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Semiconductor Material Polishing using Doosan M1509

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Application Field
Industry > Semiconductor·Display, Application > Deburring·Post-processing, Sector > Manufacturing
Industry > Semiconductor·DisplayApplication > Deburring·Post-processingSector > Manufacturing

This machine tending solution utilizes the Doosan M1509 collaborative robot to automate the hazardous and physically demanding task of polishing the surfaces of heavy semiconductor materials. The project was initiated to improve operational efficiency by reassigning workers to higher-value tasks and to enhance customer trust through consistent schedule and quality management.

Previously, manual polishing caused significant strain on workers' wrists and exposed them to high levels of dust, leading to high turnover and a lack of specialized expertise. This inconsistency in the workforce often resulted in fluctuating product quality. By implementing this automation, the robot performs the entire polishing cycle—including the mandatory replacement of one-time-use polishing pads—ensuring uniform quality while allowing operators to simply load raw materials and collect finished goods.

Components

Robot
  • Robot: Doosan M1509 (M-Series)

    • Type: 6-axis articulated collaborative robot

    • Features: Equipped with 6 high-performance torque sensors (one in each joint) for advanced force control.

    • Payload: 15kg

    • Reach: 900mm

    • Weight: 32kg

    • Repeatability: ±0.05mm

Workflow

STEP 1.Infeed: Raw materials are fed into the system.
STEP 2.Picking: The M1509 picks up the heavy semiconductor material.
STEP 3.Transit: Moves the material to the polishing station.
STEP 4.Polishing: Executes the primary surface polishing.
STEP 5.Multi-axis Polishing: Changes orientation to polish the top, bottom, and side surfaces.
STEP 6.Outfeed: Places the finished product on the discharge table.
STEP 7.Pad Replacement: Automatically replaces the one-time-use polishing pad.
STEP 8.Cycle Repeat: Returns to Step 1 for the next workpiece.

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ⓒ2020-2026 Bigwave Robotics Inc. All Rights Reserved.

Bigwave Robotics Inc.

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ⓒ2020-2026 Bigwave Robotics Inc. All Rights Reserved.